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“Zhongwei Company has released six independently developed devices, accelerating its platform-based layout.”

2026-09-05 08:00 Products & Apps 🔥 42.2 heat score
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SummaryAI generated

During the 14th Semiconductor Equipment, Materials, and Core Components Exhibition (CSEAC 2026), Zhongwei Company introduced six newly developed micro-processing devices, covering processes such as ultra-high aspect ratio etching, PECVD, ALD, metal film deposition, and silicon carbide epitaxy. Among them, the PrimoXD-RIE™ etcher can achieve ultra-high aspect ratio etching with a ratio of 70:1 to 90:1; PerformoQuaStar®ON, as the first product in the PECVD series, can process up to 16 wafers simultaneously on a single system. Since its establishment in 2004, Zhongwei Company has developed 54 high-end semiconductor devices. Over 8,800 reaction stations have been mass-produced on more than 220 production lines at home and abroad. Currently, more than 50 device products cover over 30% of pre-processing integrated circuit equipment products.

Related eventsRELATED EVENTS
Key entitiesKEY ENTITIES
PerformoQuaStar®ONPrimoXD-RIE™Zhongwei CompanyZhongwei Semiconductor Equipment (Shanghai) Co., Ltd.

Coverage · reports per dayLANGUAGE SPLIT

Entity relations
PerformoQuaStar®ON × Pr…1PerformoQuaStar®ON × Zh…1PerformoQuaStar®ON × Zh…1PrimoXD-RIE™ × Zhongwei…1PrimoXD-RIE™ × Zhongwei…1Zhongwei Company × Zhon…1

SignalsSIGNALS

Keyword heat
  • Zhongwei Company1
  • Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd.1
  • PrimoXD-RIE™1
  • PerformoQuaStar®ON1

All reports (1)SOURCES

科技日报·要闻滚动 zh 2026-09-05 08:00

“Zhongwei Company released six independently developed devices, accelerating its platform-based layout.”

During the 14th Semiconductor Equipment, Materials, and Core Components Exhibition (CSEAC 2026), SMIC introduced six newly developed micro-processing equipment, covering processes such as ultra-high depth-width ratio etching, PECVD, ALD, metal film deposition, and silicon carbide epitaxy. Among them, the PrimoXD-RIE™ etcher can achieve ultra-high depth-width ratio etching with a ratio of 70:1 to 90:1; PerformoQuaStar®ON, as the first product in the PECVD series, can process up to 16 wafers simultaneously on a single system. Since its establishment in 2004, SMIC has developed 54 high-end semiconductor equipment. Over 8,800 reaction units have been mass-produced on more than 220 production lines domestically and internationally. Currently, more than 50 equipment products cover over 30% of pre-process integrated circuit equipment products.